An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs
نویسندگان
چکیده
منابع مشابه
An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs
We report an equivalent circuit model for MEMS (microelectromechanical systems) electrostatic actuator using open-source circuit simulator Qucs (quite universal circuit simulator). Electrostatic force, equation of motion, and Kirchhoff’s laws are implemented by using the EDD (equation defined device) function of Qucs. Mathematic integral operation in the equation of motion is interpreted into e...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2009
ISSN: 1349-2543
DOI: 10.1587/elex.6.256